Applications
QML-4CI is a four-lane inline plasma cleaning system which has been designed to sustain all the demands of a 24/7 continuous inline production environment where large-scale production volumes are top priority.
QML-4CI main advantage is its two independent plasma chambers. Each plasma chamber can accommodate the loading and unloading of two carriers at the same time in one movement; the total four carriers in the machine are then processed in parallel guaranteeing a high throughput production.
QML-4CI conveyors systems can be configured to accept one or two carriers from the upstream conveyor at once as well as providing one or two carriers to the downstream system at once.
Advanced traceability options are available on this system to easily integrate with a variety of Manufacturing Execution Systems (MES).
In manufacturing, QML-4CI is typically used for:
- Plasma cleaning before wire-bonding on modules
- Plasma cleaning before transfer molding on modules
- Plasma cleaning on PCBs, BGA substrates
QML-4CI has been used in a range of applications within the Semiconductors and Automotive industries.
Specifications
Machine Type
Four-Lane Inline Plasma System
Footprint
1380W x 2560L x 1636H mm
Plasma chamber configuration
Two plasma chambers each containing two carriers
Max product size
Carrier: 170W x 315L x 35H mm (customizable)
Min product size
Carrier: 35W x 100L x 1H mm (customizable)
Plasma generator
Double 600W RF Generator 13.56 MHz
Automatic tuning systems
Gas lines
2 Process gas lines with Mass Flow Controller
Pumping system
Double dry vacuum pump 1000 L/min
Controller
Win10 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Compare SCI Systems
Category
Inline
Inline
Inline
Machine Type
Four-Lane Inline Plasma System
Dual-Lane Inline Plasma System
Super Compact Inline Plasma System
Footprint
1380W x 2560L x 1636H mm
1424W x 1847L x 1636H mm
478W x 1590L x 1727H mm
Plasma Chamber Configuration
Two plasma chambers each containing two carriers
Two tracks for each products carrier
1 holder for products carrier
Max product size
Carrier: 170W x 315L x 35H mm (customizable)
Carrier: 200W x 315L x 35H mm (customizable)
Carrier: 200W x 300L x 25H mm (customizable)
Min product size
Carrier: 35W x 100L x 1H mm (customizable)
Carrier: 35W x 100L x 1H mm (customizable)
Carrier: 40W x 100L x 1H mm (customizable)
Plasma generator
Double 600W RF Generator 13.56 MHz
Automatic tuning systems
600W RF Generator 13.56 MHz
Automatic tuning system
300W RF Generator 13.56 MHz
Automatic tuning system
Gas lines
2 Process gas lines with Mass Flow Controller
2 Process gas lines with Mass Flow Controller
2 Process gas lines with Mass Flow Controller
Pumping system
Double dry vacuum pump 1000 L/min
Dry vacuum pump 1000 L/min
Dry vacuum pump 1000 L/min
Controller
Win10 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Win10 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Win10 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz, 4.8KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line