TITAN

Batch Plasma System

TITAN image 1

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Applications

Titan is a batch plasma cleaning system designed to process lead frames in magazines.

Differently from others batch plasma systems, the Titan plasma chamber has been designed to accommodate up to 6 magazines in well-defined positions.
This guarantees that, no matter the magazine size, each lead frame in the magazine is processed equally and homogeneous results are obtained in all magazines.
This is the most important feature that has been considered during the design of Titan.

Processing lead frames in magazines can sometimes be preferred for fragile lead frames, or for lead frame that have already undergone wire-bonding. This avoids issues that may arise when automatic systems displace lead frames with wires that may break or be damaged.

The main applications of Titan are:

  • Plasma cleaning before wire-bonding
  • Plasma cleaning before transfer molding

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Specifications

Machine Type

Batch Plasma System

Footprint

794W x 1045L x 1705H mm

Plasma chamber configuration

6 dedicated holders for magazines

Max product size

Magazine: 100W x 250L x 150H mm

Min product size

N/A

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

Gas lines

2 Process gas lines with Mass Flow Controller
1 Purge line

Pumping system

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE S2 S8 Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

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Compare SCI Systems

Category

Lead frames

Lead frames

Lead frames

Machine Type

Batch Plasma System

High Volume Plasma System

Fully Automatic Plasma System

Footprint

794W x 1045L x 1705H mm

784W x 1838L x 1566H mm

1296W x 1496L x 1890H mm

Plasma Chamber Configuration

6 dedicated holders for magazines

4 or 5 strips processed at the same time

5 strips processed at the same time

Max product size

Magazine: 100W x 250L x 150H mm

Lead frame: 100W x 300L x 1.5H mm Magazine: 107W x 300L x 250H mm

Lead frame: 100W x 300L x 1.5H mm
Magazine: 115W x 305L x 250H mm

Min product size

N/A

Lead frame: 22W x 50L x 0.05H mm Magazine: 30W x 50L mm

Lead frame: 20W x 50L x 0.05H mm
Magazine: 25W x 50L mm

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

600W RF Generator 13.56 MHz
Automatic tuning system

600W RF Generator 13.56 MHz
Automatic tuning system

Gas lines

2 Process gas lines with Mass Flow Controller
1 Purge line

2 Process gas lines with Mass Flow Controller

2 Process gas lines with Mass Flow Controller

Pumping system

Dry vacuum pump 1000 L/min

Dry vacuum pump 1000 L/min

Dry vacuum pump 5000 L/min

Controller

Win10 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE S2 S8 Cleanroom ISO7 (10k)

CE S2 S8 E10 Cleanroom ISO7 (10k)

CE S2 S8 E10 Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package to scan each lead frame
Purge line

Kit for using pure hydrogen and hydrogen generator
Traceability package to scan each lead frame
Purge line

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I am interested in these systems:

Batch

Inline

Lead frames

Instrument

High power

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